Clean Room & Nanofabrication Facility
An Open User Facility at Boston College
Open to both Boston College and External Users, 该实验室拥有价值数百万美元的30多个高端微纳米仪器系统.
Comprised of 1,500 square feet of Class 1,000 and Class 10,000 cleanroom spaces, 该实验室使高灵敏度的材料和设备能够在没有污染物的情况下制造. 此外，还有超过2000平方英尺的服务和支持空间. 该实验室由一个空气处理装置支持，每45秒彻底清洁和电子游戏正规平台设施中的所有空气.
Specs
- 1500 sqft of class 1,000 and 10,000 clean room space
- 2,000sqft of service and support area space
- 10,000 CFM空气处理机组，每小时换气约75次
- Room temperature between 65-70°F
- Relative humidity of 50-60%
- 18.2 MegOhm deionized water
- 室内氮气(N2)从液氮中沸腾，35- 45psi
- Compressed Dry Air (CDA) delivery pressure 90-100 psi
- 30+ Capital equipment systems
Safe Environment
- 洁净室内外安全洗眼和安全淋浴
- 3 exhaust hoods for chemical work.
- 进入洁净室前需要穿工作服，以保护环境和正在处理的样品. 提供无颗粒蓬松帽，工作服，鞋套，手套和安全眼镜.
- Face shields, chemical resistant aprons, protective sleeves, 并且为化学工作提供了重型耐化学手套.
- 所有高压设备至少有一个EMO用于出现问题时的紧急关闭
- There are no highly toxic gases.
Dedicated Staff
Every user receives training from our staff. 工作人员在那里帮助用户排除故障，并在必要时提供支持.
Why BCISCRNF
- State of the art facility and equipment
- Perfect for small start-up companies and colleges
- Easy set-up for new users
- Cost effective/affordable rates
- One-on-one training
Laboratory
STANDARD OPERATING PROCEDURES
- 新用户必须在白天(朝九晚五)至少运行设备3次。.
- Where applicable, reserve equipment before use.
- Use equipment only as it is intended to be used.
- Report any problems to a staff member.
ORIENTATION & TRAINING
Before orientation, Non-BC users must complete the Facilities Use Agreement for External Users. Boston College users must complete the Authorization Request form. 经批准后，新用户在使用设备前必须接受培训和培训计划. Please contact Steve Shepard to schedule a time for training.
BILLING
Please note that Boston College’s terms are NET 30. 所有设施发票必须在发票之日起30天内支付. 逾期超过60天的发票将导致暂停用户访问，直到所有未付发票全部付清.
GOWNING
Gowning must take place from the top down. 用户需要按顺序戴上帽子、兜帽、西装、靴子和手套.
BUDDY SYSTEM
出于安全考虑，我们要求用户在实验室工作时使用伙伴系统. 在进行有潜在危险的操作时，一定要确保有人和你在实验室. 当用户只是在实验室观察时，作为伙伴系统的一部分，该用户将不被收取洁净室使用费.
CANCELLATION POLICY
综合科学洁净室和纳米制造设施有24小时取消政策. 如果您不能兑现预订，请至少提前24小时通知酒店经理. 我们意识到所有的项目都需要工具之间的某个过程流, so one problem may throw off your entire schedule. 在这种情况下，24小时取消政策将不适用.
Please email Steve Shepard for any questions regarding cancellation.
Equipment and Rates
| General | Internal Rates (Boston College) | External Academic Rates (non profit) | External Commercial Rates |
|---|---|---|---|
| Cleanroom Use | $32/hr | $32/hr | $60/hr |
| Remote Staff Assistance | $100/hr | $100/hr | $100/hr |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Scanning Electron Microscope | JEOL JSM-7001F | $44/hr | $44/hr | $105/hr |
| EDX (on SEM) | Oxford | included in SEM rate | included in | included in |
| Focused Ion Beam System | JEOL JIB-4500 | $45/hr | $55/hr | $115/hr |
| Nanomanipulation and Electrical Probing Micromanipulator | Kleindiek MM3A | included in FIB rate | included in FIB rate | included in FIB rate |
|
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Mask Aligner | Kari Suss MA6 | -- | -- | -- |
| E-Beam Writer (on SEM) | Nabity | $44/hr | $44/hour | $105/hr |
| Resist Spinner Fume Hood |
FWS-196-SS | -- | -- | -- |
| Resist Spinner (2) |
Cee 100 | -- | -- | -- |
| Resist Spinner | Laurell WS-400E | -- | -- | -- |
| Hot Plates (2) | -- | -- | -- | -- |
| Photoresist Stabilization System | Optical Associates PL-16-100 UV | -- | -- | -- |
| Thermal Scanning Probe Lithography (t-SPL) system |
Nanofrazor Scholar | -- | -- | -- |
| Direct Write Maskless Aligner |
µMLA | -- | -- | -- |
*If the Heidelberg Nanofrazor Scholar 是否用于数据收集，后来用于任何出版物，海报或演示文稿等., 请务必以以下声明的方式感谢美国国家科学基金会的支持:“本[出版物/演讲/海报]中报道的电子游戏正规平台得到了美国国家科学基金会核磁共振项目的支持，奖励号为1S10OD026910-01A1.”2117711"; Principal Investigator: Kenneth, Burch
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Sputter Deposition System | AJA International Orion 8 | $40/hour | $40/hour | $95/hr |
| Benchtop Sputter Deposition | Anatech Hummer 6.6 | $10/run | $10/run | $25/run |
| Atomic Layer Deposition | Ultratech | $15/hr | $15/hr | $50/hr |
| E-Beam Deposition System | Kurt J. LeskerPVD-75 | $35/run | $40/run | $75/run |
| Thermal Evaporator | Kurt J. LeskerPVD-75 | $10/hr | $10/hr | $45/hr |
| Sputter Deposition System | Kurt J. LeskerPVD-75 | $35/run | $35/run | $75/run |
| PE-CVD | Plasma-Therm Vesaline LL | $40/run | $40/run | $95/run |
| E-Beam/Thermal Evaporator | Sharon Vacuum | $35/hr | $40/hr | $75/hr |
| Electroplating System | Reynolds Tech | -- | -- | -- |
| Atomic Layer Deposition System | Arradiance GemStar ALD System | $15/hr | $15/hr | $50/hr |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Optical Microscope (High Power) | Olympus BX61 | -- | -- | -- |
| Optical Microscope (Low Power) | Carl Zeiss, Inc. | -- | -- | -- |
| Reflectometer | Mission Peak Optics MP100-S | -- | -- | -- |
| Surface Profilometer | Veeco Dektak 150 | -- | -- | -- |
| Spectroscopic Ellipsometer | J.A.WoollamVertical VASE | -- | -- | -- |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| ICP RIE | Plasma-ThermVersaline LL ICP | $40/hr | $40/hr | $95/hr |
| Acid Etching Fume Hood | Reynolds Tech FWS-196-4910 | -- | -- | -- |
| UV-Ozone Stripper | Samco UV-1 | -- | -- | -- |
| Microwave Plasma Etch | PVATePla PS-210 | -- | -- | -- |
| XeF2 Etch System | XACTIX X-SYS- EXP Xetch | $15/hr | $20/hr | $50/hr |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Solvent Cleaning Fume Hood | Reynolds Tech FWS-196-SS | -- | -- | -- |
| Critical Point Dryer | Tousimis Autosamdri-815B | $8/run | $15/run | $25/run |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Atmospheric Furnace | Lindberg/Blue M 3-Zone Tube Furnace STF55666C | $15/hr | $20/hr | $50/hr |
| Oven, general purpose (2) | -- | -- | -- | -- |
| Vacuum Oven (2) | -- | -- | -- | -- |
| Rapid Thermal Processor | Allwin21 RTP | $5/run | $10/run | $20/run |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| Bead Blaster | Econoline Abrasive Blasting Cabinet | $15/hr | $15/hr | $40/hr |
| Dicing Saw | DiscoUSA DAD3220 | $16/hr* | $20/hr* | $65/hr* |
| Diamond Wheel Saw | South Bay TechModel 650 | -- | -- | -- |
| Wire Bonder | West-Bond Model 747630E | $10/hr | $15/hr | $35/hr |
| Equipment | Vendor & Model | Internal Rates | External Academic Rates | External Commercial Rates |
|---|---|---|---|---|
| RF LCR Meter | Agilent 4287A | -- | -- | -- |
| Probe/Test Station | Cascade Microtech M150 | -- | -- | -- |
| Four Point Probe Station | Jandel MHMP/RMS-AR | -- | -- | -- |
Frequently Asked Questions
1000级洁净室意味着小于1000个大于0的颗粒.5 micrometer in size per square foot. 1万级洁净室中大于0的颗粒少于1万个.5 in size per square foot. 该实验室由一个空气处理装置支持，每45秒彻底过滤和电子游戏正规平台设施内的空气.
Contact Steve Shepard他是纳米制造设备代理经理，他能帮你安排时间.
Contact Steve Shepard他是代理纳米制造设备经理，他可以带你开始.
BC非常重视个人防护装备(PPE). To enter the lab, all users must have the following PPE:
- Long Pants or an Ankle-Length Skirt
- Closed Toed Shoes (no sandals, no flip-flops)
- Eye Protection (glasses or safety-glasses)
停车方便，可供洁净室用户使用. Please contact Steve Shepard for more information.
Examples of Work Being Done in the Facility
纳米等离子体天线无线通信系统, J. Merlo, N. Nesbit, Yitzi Calm, A. Rose, L. D’Imperio, C. Yang, J. Naughton, K. Kempa, M. J. Naughton, Scientific Reports 6.31710 DOI: 10.1038/srep 31710 (2016).
液滴n- seq结合微流体和n- seq鉴定复杂的单细胞表型, D. Thibault, S. Wood, P. Jensen, T. van Opijnen, bioRxiv, DOI: 10.1101/391045 (2018).
氢键控制电催化CO还原反应的产物选择性, J. Li, X. Li, C. Gunathunge, M. Waegele, PNAS, DOI: 10.1073/pnas.1900761116 (2019).
Nanocoax-based electrochemical sensor, B. Rizal, M. Archibald, T. Connolly, S. Shepard, M.J. Burns, T.C Chiles, M.J. Naughton, Analytical Chemistry, DOI: 10.1021/ac402411x (2013).
全溶液处理微/纳米线，用电镀焊接作为透明导电电极, C. Yang, J. Merlo, L. D’Imperio, A. Rose, Y. Calm, B. Han, J. Gao, G. Zhou, M. Burns, K. Kempa, M.J. Naughton, Physica Status Solidi-Rapid Research Letter. DOI: 10.1002/pssr.201900010 (2019).
Arrays of electrically-addressable, 独立的光传输三维纳米结构, flexible polymer films, L. D’Imperio, A. McCrossan, J. Naughton, J. Merlo, Y. Calm, M. Burns, M.J. Naughton, Flexible Printed Electronics, DOI: 10.1088/2058-8585/aac8fc (2018).
使用碳纳米管抗体微阵列，捕获无标记的乳腺癌细胞, Farhad Khosravi, et al, Nanotechnology, DOI: 0.1088/0957-4484/27/13/13LT02 (2016).
Cuddalorepatta, G. K., van Rees, W. M., Li, H., Pantuso, D.,Mahadevan L.M. & Vlassak, J.J.,独立超薄膜的泊松比和残余应变, Journal of the Mechanics and Physics of Solids. http://doi.org/10.1016/j.jmps.2019.103821
Cuddalorepatta, G. K., Li, H., Pantuso, D., & Vlassak, J.J. “独立超薄膜应力-应变行为的测量”，材料，卷. 9,100502, 2020. http://doi.org/10.1016/j.mtla.2019.100502.
Cuddalorepatta, G. K., Sim, G., Li, H., Pantuso, D., & Vlassak, J.J. “独立超薄膜的残余应力驱动测试技术:弹性行为和残余应变”，材料电子游戏正规平台杂志, 34(20), 3474-3482, 2019. http://doi.org/10.1557/jmr.2019.278
Nanofabrication & Cleanroom Facility
Chris Gunderson
Boston College
245 Beacon St.
Room #005 C
Chestnut Hill, MA 02467
617 552 0049
gunderch@basilinfracon.com